对比传统投影式光刻:
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从结构的实现精度上来看,纳米压印光刻可以实现几纳米的线宽范围; -
同时纳米压印光刻技术可以适配多样性的结构,例如三维的棱镜、棱柱、微透镜等等; -
针对成型材料,压印胶既可以选择掩膜刻蚀材料,例如光刻胶,也可以选择带有光学性能的,高折/中折/低折的压印胶,压印胶在压印之后可以直接作为产品的结构进行切割出货,不需要刻蚀,制作过程简便; -
从价格上来说,纳米压印设备比传统的投影式光刻机便宜一到两个数量级,极具性价比。
The original article was first published on the WeChat official account (Aibang VR Industry News):纳米压印应用于微纳光学产品量产解决方案与最新进展
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